Comparison of Two Kinds of Large Displacement Precision Parallel Mechanisms for Micro/nano Positioning Applications

This paper presents kinematic analysis of two kinds of large displacement parallel platforms for micro/nano positioning applications. The kinematics model of the dual parallel mechanism systems is established via the stiffness model of individual wide-range flexure hinge. The displacements of the end platform and the input parameters of prismatic actuators are discussed and the corrected values of input motions are proposed on some checking points in workspace referring to the real parameters of two kinds of In-Plane parallel mechanisms. The FEA models are established by ANSYS software, both the theoretical analysis and FEA simulation results are presented and compared. The investigations of this paper will provide suggestions to improve the structure optimization for a class of parallel mechanism in order to achieve such features as larger workspace and higher motion precision.