Design of a magnetically-isolated pulsed power system for a 1 kW XeCl excimer laser

Author

McDonald, K. ; Ingwerson, P. ; White, E. ; Young, C. ; Sergoyan, E. ; Fisher, C.

Author_Institution

Spectra Technol. Inc., Bellevue, WA, USA

fYear

1988

fDate

20-22 Jun 1988

Firstpage

202

Lastpage

207

Abstract

A 20 J per-pulse, 50 Hz, 2 kW average-power excimer gas laser pulser has been designed. The design utilizes a high-efficiency spiker-sustainer circuit with a magnetic isolation circuit to achieve high-power, efficient electrical pumping combined with long lifetime and reliable switching of high currents. This design makes possible the operation of XeCl lasers at high pulse energy and high power. The charging and firing sequence, magnetic isolation switch, sustainer pulse-forming network, power conditioning, pulser tank, and control system are described

Keywords

excimer lasers; laser accessories; power supplies to apparatus; pulsed power technology; xenon compounds; 1 kW; 20 J; 50 Hz; XeCl excimer laser; charging sequence; control system; electrical pumping; firing sequence; gas laser pulser; high-efficiency spiker-sustainer circuit; magnetic isolation switch; magnetically-isolated pulsed power system; power conditioning; pulser tank; sustainer pulse-forming network; Gas lasers; Magnetic circuits; Magnetic switching; Optical design; Optical pulses; Power system reliability; Pulse power systems; Pump lasers; Switches; Switching circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Modulator Symposium, 1988. IEEE Conference Record of the 1988 Eighteenth

Conference_Location

Hilton Head, SC

Type

conf

DOI

10.1109/MODSYM.1988.26268

Filename

26268