Title :
A Ta2O5 solid-electrolyte switch with improved reliability
Author :
Sakamoto, Toshitsugu ; Banno, Naoki ; Iguchi, Noriyuki ; Kawaura, Hisao ; Sunamura, Hiroshi ; Fujieda, Shinji ; Terabe, Kazuya ; Hasegawa, Tsuyoshi ; Aono, Masakazu
Abstract :
We present a novel solid-electrolyte switch ("NanoBridge") promising for application to field programmable gate array (FPGA). We replace a former solid electrolyte of Cu2S with Ta2O5, which has a Si-process compatibility, . As a result, we successfully control the turn-on voltage to adapt to CMOS operation. The Ta2O5-NanoBridge exhibits a high reliability of cycling endurance (>104) and a stability against EM (>10 years at 2.6 mA at RT). Furthermore, we demonstrate that the conducting path of the switch is a Cu precipitate with 30 nm in diameter, which possibly enables to scale down the switch.
Keywords :
CMOS integrated circuits; semiconductor device reliability; solid electrolytes; superconducting microbridges; tantalum compounds; FPGA; Ta2O5; field programmable gate array; process compatibility; solid-electrolyte switch; Bridge circuits; Electrodes; Field programmable gate arrays; Materials science and technology; National electric code; Solids; Stability; Switches; Temperature; Voltage control;
Conference_Titel :
VLSI Technology, 2007 IEEE Symposium on
Conference_Location :
Kyoto
Print_ISBN :
978-4-900784-03-1
DOI :
10.1109/VLSIT.2007.4339718
