Asymmetric Bipolar Pulsed Power Based on DSP for Magnetron Sputtering

In order to meet the requirements of the magnetron sputtering, an asymmetric bipolar pulsed power supply based on DSP is presented in this paper. It can freely adjust the pulse parameters including pulse amplitude, frequency, duty cycle, and even the number and transition time of the positive and negative pulse according to the sputtering demands. Finally, a 5kW/ 100kHz prototype is designed. It adopts two isolated DC/DC converters as the current source, and an asymmetric pulses generator. The digital signal processor (DSP) fulfills the digital closed loop control of current sources. Meanwhile, it achieves the adjustment of pulse segment. The experimental results verify the designed.