DocumentCode :
3485653
Title :
Fabrication and characterization of GNR transmisson lines for MMIC applications
Author :
Kara, M.H. ; Rahim, N.A.A. ; Mahmood, M.R. ; Awang, Z.
Author_Institution :
Microwave Technol. Centre, Univ. Teknol. MARA, Shah Alam, Malaysia
fYear :
2013
fDate :
9-11 Dec. 2013
Firstpage :
42
Lastpage :
46
Abstract :
In this paper graphene nanoribbons (GNRs) are proposed as a new conductive material for monolithic microwave integrated circuit (MMIC) transmission lines to replace existing materials, because they have the potential to offer better performance. Multi-layered graphene films were grown on SiO2/Si wafers coated with Ni using chemical vapour deposition. Co-planar GSG electrodes of various widths and lengths were patterned on the graphene film using electron beam lithography (EBL) and wet chemical etching to form the transmission lines compatible with microwave wafer probes used in the measurements. The lines and the underlying SiO2/Si layers were then modeled as thin film co-planar waveguide (TFCPW) before characterization and their microwave behavior was simulated using CST Microwave Studio electromagnetic simulator. By curve-fitting the experimental results with simulation, graphene parameters were subsequently extracted. From I-V measurements the conductivity was found to be 2.89 × 107 S/m and scattering parameter measurements of the samples obtained at frequencies up to 20 GHz show that GNR has high potential for transmitting signals at GHz frequencies.
Keywords :
MMIC; chemical vapour deposition; conducting materials; coplanar waveguides; curve fitting; electrodes; electron beam lithography; elemental semiconductors; etching; graphene; nanofabrication; nanoribbons; nickel; semiconductor growth; semiconductor thin films; silicon; silicon compounds; C; CST Microwave Studio electromagnetic simulator; EBL; GNR transmission lines; GNRs; I-V measurements; MMIC transmission lines; Ni; SiO2-Si; TFCPW; chemical vapour deposition; conductive material; coplanar GSG electrodes; curve-fitting; electron beam lithography; graphene nanoribbons; microwave behavior; microwave wafer probes; monolithic microwave integrated circuit; multilayered graphene films; scattering parameter measurements; thin film coplanar waveguide; wet chemical etching; Coplanar waveguides; Electrodes; Films; Graphene; Probes; Silicon; Transmission line measurements; Co-planar Waveguide; Graphene Nanoribbon; MMIC;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
RF and Microwave Conference (RFM), 2013 IEEE International
Conference_Location :
Penang
Print_ISBN :
978-1-4799-2213-0
Type :
conf
DOI :
10.1109/RFM.2013.6757214
Filename :
6757214
Link To Document :
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