Title :
Si monolithic planar coreless inductors for high frequency signal transmission
Author :
Yunas, Jumril ; Majlis, Burhanuddin Yeop ; Hamzah, Azrul Azlan ; Bais, Badariah
Author_Institution :
Inst. of Microeng. & Nanoelectron., Univ. Kebangsaan Malaysia, Bangi, Malaysia
Abstract :
In this paper, we present a silicon based planar coupled inductor coil that operates at high frequency region for signal transmission and converter applications. The study is aimed to investigate the role of coreless planar inductor coil design and MEMS technology for the fabrication of the high frequency signal converter. As the result, it is shown that the coupled inductor performances are significantly affected by the coil winding and geometry. An output voltage gain of -3 dB was observed for a coil operating frequency up to 10 MHz. Topics such as lumped element model and surface micromachining process are described in detail in this paper.
Keywords :
coils; inductors; micromachining; silicon; MEMS technology; Si; converter applications; high frequency signal converter; high frequency signal transmission; lumped element model; monolithic planar coreless inductors; planar coupled inductor coil; surface micromachining process; Coils; Fabrication; Frequency measurement; Inductance; Inductors; Silicon; Substrates; MEMS fabrication; Planar coreless inductor; design; high frequency power converter; measurement;
Conference_Titel :
RF and Microwave Conference (RFM), 2013 IEEE International
Conference_Location :
Penang
Print_ISBN :
978-1-4799-2213-0
DOI :
10.1109/RFM.2013.6757215
