Title :
In-plane texture study of the yttria-stabilized zirconia films fabricated by ion-beam-assisted deposition
Author :
Yuan, Jun ; Yang, Genqing ; Mao, Yingjun ; Ren, Xingcong ; Liu, Xiannhuai ; Zou, Shichang
Author_Institution :
Ion Beam Lab., Acad. Sinica, Shanghai, China
Abstract :
Biaxially-textured Yttria-stabilized Zirconia (YSZ) films for use as buffer layers of YBCO superconducting films have been synthesized on Ni-Cr metallic substrates by using ion-beam-assisted deposition (IBAD). And the growth mechanism of biaxially-textured YSZ films controlled by ion beam has been investigated in this paper
Keywords :
ion beam applications; texture; vapour deposition; yttrium compounds; zirconium compounds; Ni-Cr metallic substrate; YBCO superconducting film; YSZ; ZrO2-Y2O3; buffer layer; growth; in-plane biaxial texture; ion-beam-assisted deposition; yttria-stabilized zirconia film; Buffer layers; Ion beams; Optical films; Sputtering; Substrates; Superconducting films; Superconducting thin films; Temperature; Transistors; Yttrium barium copper oxide;
Conference_Titel :
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-3289-X
DOI :
10.1109/IIT.1996.586533
