Title :
Low-loss fiber-to-semiconductor waveguide coupling using integrated optical mode expanders
Author :
Brenner, T. ; Bachmann, M. ; Melchior, H.
Author_Institution :
Inst. of Quantum Electron., Swiss Federal Inst. of Technol., Zurich, Switzerland
fDate :
31 Oct-3 Nov 1994
Abstract :
In this paper we report improved optical mode expanders resulting in coupling losses of below 1 dB and relaxed alignment tolerances of 2.5 μm in the horizontal and vertical directions for 1 dB in addition measured with standard single mode fiber (SMF). In a first fabrication step the OEIC waveguide components are grown by low-pressure metal-organic vapor-phase epitaxy. An oxide mask is deposited and patterned with narrowing mask openings in the optical mode expanders
Keywords :
integrated optoelectronics; OEIC waveguide components; coupling losses; fabrication step; horizontal directions; integrated optical mode expanders; low-loss fiber-to-semiconductor waveguide coupling; low-pressure metal-organic vapor-phase epitaxy; narrowing mask openings; optical mode expanders; oxide mask deposition; patterned; relaxed alignment tolerances; standard single mode fiber; vertical directions; Integrated optics; Optical coupling; Optical interconnections; Optical losses; Optical noise; Optical waveguide components; Optical waveguides; Optoelectronic devices; Semiconductor waveguides; Stimulated emission;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1470-0
DOI :
10.1109/LEOS.1994.586534
