Low-loss fiber-to-semiconductor waveguide coupling using integrated optical mode expanders

Author

Brenner, T. ; Bachmann, M. ; Melchior, H.

Author_Institution

Inst. of Quantum Electron., Swiss Federal Inst. of Technol., Zurich, Switzerland

Volume

2

fYear

1994

fDate

31 Oct-3 Nov 1994

Firstpage

267

Abstract

In this paper we report improved optical mode expanders resulting in coupling losses of below 1 dB and relaxed alignment tolerances of 2.5 μm in the horizontal and vertical directions for 1 dB in addition measured with standard single mode fiber (SMF). In a first fabrication step the OEIC waveguide components are grown by low-pressure metal-organic vapor-phase epitaxy. An oxide mask is deposited and patterned with narrowing mask openings in the optical mode expanders

Keywords

integrated optoelectronics; OEIC waveguide components; coupling losses; fabrication step; horizontal directions; integrated optical mode expanders; low-loss fiber-to-semiconductor waveguide coupling; low-pressure metal-organic vapor-phase epitaxy; narrowing mask openings; optical mode expanders; oxide mask deposition; patterned; relaxed alignment tolerances; standard single mode fiber; vertical directions; Integrated optics; Optical coupling; Optical interconnections; Optical losses; Optical noise; Optical waveguide components; Optical waveguides; Optoelectronic devices; Semiconductor waveguides; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE

Conference_Location

Boston, MA

Print_ISBN

0-7803-1470-0

Type

conf

DOI

10.1109/LEOS.1994.586534

Filename

586534