Title :
Reduction of DC drift in LiNbO3 optical waveguide devices by ion exchange
Author :
Kaneyama, Y. ; Funaki, T. ; Yamanaka, S. ; Kawaji, H. ; Tomotsune, K. ; Kawatani, A.
Author_Institution :
Transmission Eng. Div., NEC Corp., Japan
fDate :
31 Oct-3 Nov 1994
Abstract :
The DC drift in Ti-diffused LiNbO3 optical waveguide devices were remarkably reduced by adding an ion exchange process before the deposition of buffer layers in the device fabrication. The ion exchange was performed by heating the Ti-diffused LiNbO3 substrate in molten alkaline metal nitrates. Lithium nitrate was found most effective
Keywords :
lithium compounds; DC drift; LiNbO3 optical waveguide devices; LiNbO3:Ti; Ti-diffused LiNbO3 optical waveguide devices; Ti-diffused LiNbO3 substrate; buffer layers; device fabrication; ion exchange; ion exchange process; lithium nitrate; molten alkaline metal nitrates; Buffer layers; National electric code; Optical buffering; Optical devices; Optical signal processing; Optical surface waves; Optical waveguides; Particle beam optics; Sputtering; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1470-0
DOI :
10.1109/LEOS.1994.586545