DocumentCode
3486545
Title
Molecular Ion Implantation Technique For Obtaining The Same Depth Profile For The Component Atoms
Author
Ishikawa, Junzo ; Tsuji, Hiroshi ; Mimura, Masakazu ; Gotoh, Yasuhito
Author_Institution
Department of Electronic Science and Engineering, Kyoto University
fYear
1996
fDate
16-21 June 1996
Firstpage
776
Lastpage
779
Keywords
Atomic layer deposition; Atomic measurements; Computer simulation; Energy exchange; Hydrogen; Ion implantation; Neutrons; Nuclear electronics; Solids; Space charge;
fLanguage
English
Publisher
ieee
Conference_Titel
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location
Austin, TX, USA
Print_ISBN
0-7803-3289-X
Type
conf
DOI
10.1109/IIT.1996.586568
Filename
586568
Link To Document