Title :
Molecular Ion Implantation Technique For Obtaining The Same Depth Profile For The Component Atoms
Author :
Ishikawa, Junzo ; Tsuji, Hiroshi ; Mimura, Masakazu ; Gotoh, Yasuhito
Author_Institution :
Department of Electronic Science and Engineering, Kyoto University
Keywords :
Atomic layer deposition; Atomic measurements; Computer simulation; Energy exchange; Hydrogen; Ion implantation; Neutrons; Nuclear electronics; Solids; Space charge;
Conference_Titel :
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location :
Austin, TX, USA
Print_ISBN :
0-7803-3289-X
DOI :
10.1109/IIT.1996.586568
