DocumentCode :
3487351
Title :
Fabrication of the main electrodes of the NMIA-BIPM calculable capacitor
Author :
Small, G.W.
Author_Institution :
Nat. Meas. Inst., Lindfield, NSW, Australia
fYear :
2010
fDate :
13-18 June 2010
Firstpage :
543
Lastpage :
544
Abstract :
The design of the NMIA-BIPM calculable cross capacitor includes the requirement that the main electrodes be geometrically true cylinders to within 100 nm over all but the last 50 mm at each end of their length. After much experimentation, techniques have been developed that result in the fabrication of electrodes that comfortably meet this requirement.
Keywords :
capacitors; electrodes; NMIA-BIPM calculable cross capacitor design; electrode fabrication; size 100 nm; size 50 nm; Capacitors; Electrodes; Fabrication;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location :
Daejeon
Print_ISBN :
978-1-4244-6795-2
Type :
conf
DOI :
10.1109/CPEM.2010.5544846
Filename :
5544846
Link To Document :
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