An advanced 0.25-μm BiCMOS process integration technology for multi-GHz communication LSIs

Author

Kinoshita, Y. ; Suzuki, H. ; Nakamura, S. ; Fukaishi, M. ; Tajima, A. ; Sucmura, Y. ; Itani, T. ; Miyamoto, H. ; Fuji, H. ; Yotsuyanagi, M. ; Henmi, N. ; Yamazaki, T.

Author_Institution

ULSI Device Dev. Labs., Kanagawa, Japan

fYear

1997

fDate

28-30 Sep 1997

Firstpage

72

Lastpage

75

Abstract

This paper presents an advanced BiCMOS process integration technology, which employs 0.25-μm Ti salicide p⁺/n⁺ dual gate CMOSFETs, double poly-Si self-aligned bipolar transistors and passive elements such as double poly-Si capacitors and poly-Si resistors, while reducing the number of process steps. We also have demonstrated a one-chip transceiver LSI circuit for an optical data link using the ANSI fiber-channel standard of 4.25 Gb/s. The voltage controlled oscillator (VCO) of the clock recovery circuit oscillates from 3.2 GHz to 6.8 GHz according to the control voltage

Keywords

BiCMOS integrated circuits; large scale integration; mixed analogue-digital integrated circuits; mobile communication; optical communication equipment; optical fibre communication; optical links; transceivers; 0.25 micron; 3.2 to 6.8 GHz; 4.25 Gbit/s; ANSI fiber-channel standard; BiCMOS process integration technology; Si; TiSi₂; clock recovery circuit; control voltage; double polysilicon capacitors; mixed analogue-digital ICs; multi-GHz communication LSIs; one-chip transceiver; optical data link; p⁺/n⁺ dual gate CMOSFETs; passive elements; polysilicon resistors; polysilicon self-aligned bipolar transistors; voltage controlled oscillator; ANSI standards; BiCMOS integrated circuits; Bipolar transistors; CMOS technology; CMOSFETs; Capacitors; Large scale integration; Resistors; Transceivers; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Bipolar/BiCMOS Circuits and Technology Meeting, 1997. Proceedings of the

Conference_Location

Minneapolis, MN

ISSN

1088-9299

Print_ISBN

0-7803-3916-9

Type

conf

DOI

10.1109/BIPOL.1997.647359

Filename

647359