DocumentCode :
3487729
Title :
Silicon Sensors And Microstructures
Author :
Bryzek, Janusz
Author_Institution :
NovaSensor
fYear :
1991
fDate :
16-18 April 1991
Firstpage :
661
Lastpage :
665
Keywords :
Atomic measurements; Costs; Electrostatic measurements; Magnetic field measurement; Mechanical sensors; Microstructure; Sensor systems; Silicon; Transducers; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electro International, 1991
Conference_Location :
New York, NY, USA
Type :
conf
DOI :
10.1109/ELECTR.1991.718293
Filename :
718293
Link To Document :
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