Title :
Silicon Sensors And Microstructures
Author_Institution :
NovaSensor
Keywords :
Atomic measurements; Costs; Electrostatic measurements; Magnetic field measurement; Mechanical sensors; Microstructure; Sensor systems; Silicon; Transducers; Wavelength measurement;
Conference_Titel :
Electro International, 1991
Conference_Location :
New York, NY, USA
DOI :
10.1109/ELECTR.1991.718293