DocumentCode
3487729
Title
Silicon Sensors And Microstructures
Author
Bryzek, Janusz
Author_Institution
NovaSensor
fYear
1991
fDate
16-18 April 1991
Firstpage
661
Lastpage
665
Keywords
Atomic measurements; Costs; Electrostatic measurements; Magnetic field measurement; Mechanical sensors; Microstructure; Sensor systems; Silicon; Transducers; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Electro International, 1991
Conference_Location
New York, NY, USA
Type
conf
DOI
10.1109/ELECTR.1991.718293
Filename
718293
Link To Document