Title :
Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques
Author :
Mitchell, A. ; Holland, A. ; Vora, K. ; Ghantasala, M.K.
Author_Institution :
Sch. of Electr. & Comput. Sci., R. Melbourne Inst. of Technol. Univ., Vic., Australia
Abstract :
Recent progress on the realization of a silicon integrated biophotonic chip using plasma etching and laser ablation is presented. The chip utilizes films of SU-8 and UV-15 polymer material. An intersecting optical waveguide and microfluidic channel exhibiting good optical transmission across the channel is demonstrated.
Keywords :
integrated optics; laser ablation; light transmission; micro-optics; microfluidics; optical fabrication; optical polymers; optical waveguides; sputter etching; intersecting optical waveguide; laser ablation; microfluidic channel integration; optical transmission; plasma etching; polymer material; polymer microfabrication technique; silicon integrated biophotonic chip; Biomedical optical imaging; Biophotonics; Integrated optics; Microfluidics; Optical films; Optical polymers; Optical waveguides; Plasma applications; Polymer films; Silicon;
Conference_Titel :
Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004 Digest of the LEOS Summer Topical Meetings
Print_ISBN :
0-7803-8306-0
DOI :
10.1109/LEOSST.2004.1338655
