Calibration for contact type of micro-manipulation

In the biotechnology field, it is very difficult to manipulate microscopic material through human handling. There is a great need for a new experiment system that is easy to operate. We show a 3D calibration technique for improving positional errors of a glass pipette tip, furnished on a micro-manipulator. We then propose a method of observing the manipulator tip of sub-micron order accuracy using a newly developed lighting method by an optical fiber. We also take account of the influence of the positional error of the z-axis introduced from the optical system. In the last part of the paper, we show the effectiveness of these methods through experiments