Magnetic rotational micro-wings applicable to microrobots

As the method of mobility for microrobots flight is more advantageous than walking due to the scale effect. In this work the flight mechanism that gains thrust by rotating magnetic wings in an alternating magnetic field is proposed. Micro-sized models whose wings are around 1 mm long were fabricated using MEMS technology. The wings are made of electroplated nickel or cobalt-nickel alloy, and a thin glass rod is attached to the center as an axis of rotation. The glass rod is inserted into a small glass tube which works as an outer bearing. The 0.9 mm long microwings which weigh about 0.165 mg succeed in taking off at a rotating frequency of 570 Hz. It is estimated that 1.2 mm long micro-wings can lift up 0.6 mg at a rotating frequency of 600 Hz. A small helicopter which has the rotational wings, a glass tube, a soft magnetic body, and polyimide legs was fabricated. It succeeded in flying up to the 1 cm high guides with its attitude stable