Preparation of combined enviromental sensors

Author

Huang, Chunhua

Author_Institution

Sch. of Opto-Electron. Inf., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2005

fDate

11-14 Sept. 2005

Firstpage

386

Lastpage

387

Abstract

Environmental sensors are developed and used for environmental assessment such as thermal and air environments. The specified items for the thermal environmental assessment are temperature, humidity, and air flowing rate and so on. And the items for air environmental assessment include all kinds of gas sensor. In this paper, platinum temperature sensor, polyimide capacitive humidity sensor and zirconia oxygen sensors are made by magnetic sputtering technology, spin-coating method and sinter technology respectively. And the structure of combined environmental sensors that include temperature sensor, humidity sensor and oxygen sensors tern has also been designed. All the sensors used in the combined environmental sensors have been characterized and discussed.

Keywords

humidity sensors; sintering; spin coating; sputter deposition; temperature sensors; air environments; air flowing rate; combined enviromental sensor preparation; environmental assessment; gas sensor; humidity; magnetic sputtering technology; platinum temperature sensor; polyimide capacitive humidity sensor; sinter technology; spin-coating method; temperature; thermal environments; zirconia oxygen sensors; Capacitive sensors; Gas detectors; Humidity; Magnetic sensors; Platinum; Polyimides; Sensor phenomena and characterization; Sputtering; Temperature sensors; Thermal sensors; Combined sensors; Environmental Sensors; Humidity; Oxygen; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrets, 2005. ISE-12. 2005 12th International Symposium on

Print_ISBN

0-7803-9116-0

Type

conf

DOI

10.1109/ISE.2005.1612404

Filename

1612404