Title :
Preparation of combined enviromental sensors
Author_Institution :
Sch. of Opto-Electron. Inf., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
Environmental sensors are developed and used for environmental assessment such as thermal and air environments. The specified items for the thermal environmental assessment are temperature, humidity, and air flowing rate and so on. And the items for air environmental assessment include all kinds of gas sensor. In this paper, platinum temperature sensor, polyimide capacitive humidity sensor and zirconia oxygen sensors are made by magnetic sputtering technology, spin-coating method and sinter technology respectively. And the structure of combined environmental sensors that include temperature sensor, humidity sensor and oxygen sensors tern has also been designed. All the sensors used in the combined environmental sensors have been characterized and discussed.
Keywords :
humidity sensors; sintering; spin coating; sputter deposition; temperature sensors; air environments; air flowing rate; combined enviromental sensor preparation; environmental assessment; gas sensor; humidity; magnetic sputtering technology; platinum temperature sensor; polyimide capacitive humidity sensor; sinter technology; spin-coating method; temperature; thermal environments; zirconia oxygen sensors; Capacitive sensors; Gas detectors; Humidity; Magnetic sensors; Platinum; Polyimides; Sensor phenomena and characterization; Sputtering; Temperature sensors; Thermal sensors; Combined sensors; Environmental Sensors; Humidity; Oxygen; Temperature;
Conference_Titel :
Electrets, 2005. ISE-12. 2005 12th International Symposium on
Print_ISBN :
0-7803-9116-0
DOI :
10.1109/ISE.2005.1612404
