Optical signal distribution on silicon using a thin film photodetector array embedded in a multimode interference (MMI) coupler

Author

Cho, Sang-Yeon ; Seo, Sang-Woo ; Jokerst, Nan Marie

Author_Institution

Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA

fYear

2004

fDate

28-30 June 2004

Firstpage

17

Lastpage

18

Abstract

This paper reports upon the design, fabrication, and characterization of optical signal distribution in a planar lightwave format using 1 by 4 multimode interference (MMI) couplers and arrays of thin film metal-semiconductor-metal photodetectors (MSM PDs) embedded in the output waveguides of the MMI coupler for O/E conversion.

Keywords

elemental semiconductors; metal-semiconductor-metal structures; optical arrays; optical couplers; optical information processing; optical interconnections; optical planar waveguides; photodetectors; silicon; MMI coupler; MSM PD; O/E conversion; Si; multimode interference coupler; optical signal distribution; planar lightwave format; thin film metal-semiconductor-metal photodetectors; thin film photodetector array; Interference; Optical arrays; Optical coupling; Optical design; Optical device fabrication; Optical films; Photodetectors; Semiconductor thin films; Signal design; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004 Digest of the LEOS Summer Topical Meetings

ISSN

1099-4742

Print_ISBN

0-7803-8306-0

Type

conf

DOI

10.1109/LEOSST.2004.1338683

Filename

1338683