Title :
Micromachined inertial sensors
Author :
Song, Cimoo ; Ha, Byeoungju ; Lee, Sukhan
Author_Institution :
Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
The emergence of micro sensors and actuators is pushing forward the revolution of intelligent systems technology. Intelligent systems technology allows a dramatic change in the way that machines, tools, and systems serve humans. This paper reviews recent R&D and commercial status of inertial sensors using silicon micromachining technologies and discusses the requirement for commercialization of the research results
Keywords :
accelerometers; gyroscopes; intelligent sensors; micromachining; microsensors; Si; intelligent systems technology; microactuators; micromachined accelerometers; micromachined gyroscopes; micromachined inertial sensors; microsensors; silicon micromachining technologies; Fabrication; Intelligent actuators; Intelligent sensors; Machine intelligence; Mechanical sensors; Microelectromechanical systems; Micromachining; Micromechanical devices; Microstructure; Silicon;
Conference_Titel :
Intelligent Robots and Systems, 1999. IROS '99. Proceedings. 1999 IEEE/RSJ International Conference on
Conference_Location :
Kyongju
Print_ISBN :
0-7803-5184-3
DOI :
10.1109/IROS.1999.812819
