Coupled-line RF MEMS filters for millimeter-wave applications

When compared to traditional approaches for implementing millimeter-wave filters, intended for silicon integration, the use of CPW, conventional-microstrip and TFMS lead to unacceptably high losses. This paper has described a novel silicon micromachined RF-coupled cantilever inverted-microstrip millimeter-wave filter technology. Here, low insertion losses have been demonstrated with 3rd order filter implementations, designed for operation at 60 GHz and 76.5 GHz. From this work, it is believed that the technology proposed can be adapted for tunable RF MEMS applications.