Thermo-electro-mechanical V-shaped actuator design and simulations

Author

Matmat, M. ; Al Ahmad, M. ; Escriba, C. ; Soulimane, S. ; Marty, A. ; Fourniols, J.-Y.

Author_Institution

LAAS, Univ. de Toulouse, Toulouse

fYear

2008

fDate

20-23 April 2008

Firstpage

1

Lastpage

4

Abstract

This work details the 3D finite element electro- thermo-mechanical simulation of a current driven V-shaped actuator. The latter consists of two suspended polysilicon arms in a V configuration. The interest of this structure is that it can provide an important linear displacement parallel to the substrate. Stationary and parametric simulations were performed using COMSOL 3.3 and the obtained results were validated experimentally. In addition, a first attempt to model the actuator´s ageing behaviour has been made using an empirical model.

Keywords

finite element analysis; microactuators; thermomechanical treatment; 3D finite element electro-thermo-mechanical simulation; COMSOL 3.3; V-shaped actuator design; parametric simulation; stationary simulation; suspended polysilicon arms; Analytical models; Arm; Boundary conditions; Electrostatic actuators; Finite element methods; Temperature distribution; Thermal force; Thermoelectricity; Thermomechanical processes; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on

Conference_Location

Freiburg im Breisgau

Print_ISBN

978-1-4244-2127-5

Electronic_ISBN

978-1-4244-2128-2

Type

conf

DOI

10.1109/ESIME.2008.4525031

Filename

4525031