DocumentCode :
3490252
Title :
Narrow width effect of ROSIE isolated SOI MOSFET
Author :
Fung, Samuel K H ; Mansun Chan ; Chan, Simon T H ; Ko, Ping K.
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong
fYear :
1995
fDate :
3-5 Oct 1995
Firstpage :
88
Lastpage :
89
Abstract :
The recent demand for low-power electronics has driven narrow-width MOSFETs into applications. Meanwhile, SOI devices offer significant power reduction as compared with bulk devices due to the reduced parasitic capacitances. Therefore, it is very attractive to apply narrow-width MOSFETs fabricated on SOI substrate in low-power digital and analog design. However, the behavior of narrow-width SOI MOSFETs has never been reported. In this paper, the threshold voltage behavior of narrow-width FD/NFD SOI MOSFETs with ROSIE (Re-Oxidized Silicon Island Edges) isolation is reported for the first time
Keywords :
MOSFET; isolation technology; silicon-on-insulator; FD/NFD SOI MOSFET; ROSIE isolation; low-power electronics; narrow width effect; threshold voltage; Beak; Doping; Isolation technology; MOS devices; MOSFET circuits; Plasma applications; Plasma devices; Semiconductor films; Silicon; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI Conference, 1995. Proceedings., 1995 IEEE International
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-2547-8
Type :
conf
DOI :
10.1109/SOI.1995.526474
Filename :
526474
Link To Document :
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