DocumentCode
3490264
Title
A high performance lateral bipolar transistor from a SOI CMOS process
Author
Chan, Mansun ; Fung, Samuel K H ; Hu, Chenming ; Ko, Ping K.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fYear
1995
fDate
3-5 Oct 1995
Firstpage
90
Lastpage
91
Abstract
A new bipolar device structure fabricated using a SOI CMOS process has been studied. The new base contact scheme is scalable with channel width, thus giving higher performance compared with the side base contact scheme
Keywords
MOSFET; bipolar transistors; semiconductor technology; silicon-on-insulator; SOI CMOS process; base contact; fabrication; lateral bipolar transistor; BiCMOS integrated circuits; Bipolar transistors; CMOS process; CMOS technology; Contact resistance; Doping; Electrical resistance measurement; Electrodes; Electron emission; MOSFETs;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 1995. Proceedings., 1995 IEEE International
Conference_Location
Tucson, AZ
Print_ISBN
0-7803-2547-8
Type
conf
DOI
10.1109/SOI.1995.526475
Filename
526475
Link To Document