DocumentCode :
3490534
Title :
A fully integrated interface circuit for 1.5°C accuracy temperature control and 130-dB dynamic-range read-out of MOX gas sensors
Author :
Lombardi, A. ; Grassi, M. ; Bruno, L. ; Malcovati, P. ; Baschirotto, A.
Author_Institution :
Dept. of Electr. Eng., Univ. of Pavia, Pavia
fYear :
2008
fDate :
15-19 Sept. 2008
Firstpage :
78
Lastpage :
81
Abstract :
This paper presents a complete gas-sensing chip. It consists of a high-efficiency temperature control loop with a switching power stage and digital set-point and of a wide-dynamic-range interface circuit able to operate without calibration. Measurements results show that the controlled temperature of the sensor over a range of 250degC exhibits an accuracy better than 1.5degC with a maximum peak-to-peak ripple of 1.0degC. The read-out circuit achieves, without calibration, a precision in sensor resistance measurement of 2.65% over a range of 5.3 decades (Dynamic Range, DR=138 dB). The overall system is flexible and can be interfaced to sensors with different fabrication parameters. The prototype chip, designed in a 0.35-mum CMOS technology, includes on the same 10-mm2 die the precision read-out circuit and the switching power stage. In spite of the interferences produced by the power stage, the read-out circuit maintains always a DR performance above 130 dB.
Keywords :
CMOS integrated circuits; electric resistance measurement; gas sensors; microsensors; platinum compounds; readout electronics; silicon; sol-gel processing; spin coating; temperature control; temperature sensors; thin film sensors; CMOS technology; MOX gas sensor; Pt-Ti; Si; dynamic-range read-out circuit; fully integrated interface circuit; integrated platinum-titanium heater; metal-oxide thin films; prototype chip design; resistance measurement; silicon micromachined substrates; size 0.35 mum; sol-gel technique; spin coating deposition; temperature 1.5 C; temperature 250 C; temperature control; CMOS technology; Calibration; Electrical resistance measurement; Gas detectors; Integrated circuit measurements; Semiconductor device measurement; Switching circuits; Temperature control; Temperature distribution; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference, 2008. ESSCIRC 2008. 34th European
Conference_Location :
Edinburgh
ISSN :
1930-8833
Print_ISBN :
978-1-4244-2361-3
Electronic_ISBN :
1930-8833
Type :
conf
DOI :
10.1109/ESSCIRC.2008.4681796
Filename :
4681796
Link To Document :
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