• DocumentCode
    3490767
  • Title

    Circular MEM resonator: Modeling second order effects on resonance frequency

  • Author

    Nada, Y.S. ; Stoffels, S. ; Tilmans, H.A.C. ; Hegazi, E. ; Ragai, H.F. ; Shaarawi, A.M.

  • Author_Institution
    American Univ. in Cairo, Cairo
  • fYear
    2008
  • fDate
    20-23 April 2008
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    This paper suggests an analytical model for the second order effects on the resonance frequency of circular MEM resonator vibrating at the 0th order mode of vibration (pure radial). This model takes into consideration second order effects is compared to FEM simulation to verify the analytical model.
  • Keywords
    micromechanical resonators; resonance; vibrations; circular MEM resonator; resonance frequency; second order effects; vibration; Analytical models; Boundary conditions; Microelectronics; Radio frequency; Resonance; Resonant frequency; Resonator filters; Stress; Transducers; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on
  • Conference_Location
    Freiburg im Breisgau
  • Print_ISBN
    978-1-4244-2127-5
  • Electronic_ISBN
    978-1-4244-2128-2
  • Type

    conf

  • DOI
    10.1109/ESIME.2008.4525089
  • Filename
    4525089
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3490767