DocumentCode :
3490767
Title :
Circular MEM resonator: Modeling second order effects on resonance frequency
Author :
Nada, Y.S. ; Stoffels, S. ; Tilmans, H.A.C. ; Hegazi, E. ; Ragai, H.F. ; Shaarawi, A.M.
Author_Institution :
American Univ. in Cairo, Cairo
fYear :
2008
fDate :
20-23 April 2008
Firstpage :
1
Lastpage :
5
Abstract :
This paper suggests an analytical model for the second order effects on the resonance frequency of circular MEM resonator vibrating at the 0th order mode of vibration (pure radial). This model takes into consideration second order effects is compared to FEM simulation to verify the analytical model.
Keywords :
micromechanical resonators; resonance; vibrations; circular MEM resonator; resonance frequency; second order effects; vibration; Analytical models; Boundary conditions; Microelectronics; Radio frequency; Resonance; Resonant frequency; Resonator filters; Stress; Transducers; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on
Conference_Location :
Freiburg im Breisgau
Print_ISBN :
978-1-4244-2127-5
Electronic_ISBN :
978-1-4244-2128-2
Type :
conf
DOI :
10.1109/ESIME.2008.4525089
Filename :
4525089
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3490767
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