Integrated Readout and Control Electronics for a Microelectromechanical Angular Velocity Sensor

Author

Saukoski, Mikko ; Aaltonen, Lasse ; Halonen, Kari ; Salo, Teemu

Author_Institution

Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo

fYear

2006

fDate

Sept. 2006

Firstpage

243

Lastpage

246

Abstract

An ASIC is implemented for readout and control of a bulk micromachined capacitive gyroscope. Both the system architecture and details on the circuitry of different subsystems are presented. Together with digital signal processing on an FPGA chip, a complete working prototype of a microelectromechanical gyroscope is realized and measured. This plusmn100 deg/s gyroscope achieves 0.053 deg/s/yradic(Hz) spot noise and 49.9 dB signal-to-noise ratio over the 36 Hz bandwidth, with plusmn4 % offset stability over the temperature range from -40 to +85 degC. The work shows that a gyroscope can be realized with the chosen architecture, and that good performance can be achieved

Keywords

angular velocity measurement; application specific integrated circuits; capacitive sensors; detector circuits; digital signal processing chips; field programmable gate arrays; gyroscopes; microsensors; readout electronics; -40 to 85 C; 36 Hz; ASIC; FPGA chip; bulk micromachined capacitive gyroscope; control electronics; digital signal processing; integrated readout electronics; microelectromechanical angular velocity sensor; microelectromechanical gyroscope; Angular velocity; Angular velocity control; Application specific integrated circuits; Circuit noise; Digital signal processing chips; Field programmable gate arrays; Gyroscopes; Prototypes; Semiconductor device measurement; Signal to noise ratio;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2006. ESSCIRC 2006. Proceedings of the 32nd European

Conference_Location

Montreux

ISSN

1930-8833

Print_ISBN

1-4244-0303-0

Type

conf

DOI

10.1109/ESSCIR.2006.307576

Filename

4099749