DocumentCode
3491893
Title
Fabrication and measurement of electrode components for the national institute of Standards and Technology calculable capacitor
Author
Pratt, Jon R. ; Brandenburg, Nolan ; Stoup, John R. ; Lee, Raeduk ; Wang, Yicheng
Author_Institution
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
2010
fDate
13-18 June 2010
Firstpage
410
Lastpage
411
Abstract
The current effort to manufacture a new calculable capacitor at the National Institute of Standards and Technology (NIST) is summarized with a focus on issues associated with the fabrication and measurement of the geometric properties of the main electrodes. Results presented here for a diamond turned aluminum prototype electrode show a useable profile that deviates from straight by less than 25 nm as measured using the NIST M48 coordinate measuring machine.
Keywords
capacitance measurement; capacitors; electrodes; NIST; National Institute of Standards; diamond turned aluminum prototype electrode; electrode components fabrication; electrode components measurement; technology calculable capacitor; Bars; Capacitors; Coordinate measuring machines; Electrodes; Fabrication; Manufacturing; NIST; Steel; Testing; Turning;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location
Daejeon
Print_ISBN
978-1-4244-6795-2
Type
conf
DOI
10.1109/CPEM.2010.5545233
Filename
5545233
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