Title :
A low-power capacitance to pulse width converter for MEMS interfacing
Author :
Bruschi, P. ; Nizza, N. ; Dei, M.
Author_Institution :
Dipt. di Ing. dell´´Inf., Univ. di Pisa, Pisa
Abstract :
A compact converter from capacitance to pulse width, suitable for interfacing integrated capacitive sensors is described. The circuit has been designed and fabricated using 0.32 mum/ 3.3 V CMOS devices from the BCD6s process of STMicroelectroncs and occupies an area of 1025 times 515 mum2. Measurements performed on the test chip showed an excellent linearity, a temperature drift of 300 ppm/degC, and power consumption as low as 84 muW for continuous operation.
Keywords :
CMOS integrated circuits; analogue-digital conversion; capacitive sensors; detector circuits; microsensors; signal processing; BCD6s process; CMOS devices; MEMS interfacing; STMicroelectroncs; integrated capacitive sensors; low-power capacitance-to-pulse width converter; power 84 muW; size 0.32 mum; size 1025 mum; size 515 mum; voltage 3.3 V; CMOS process; Capacitance; Capacitive sensors; Circuit testing; Integrated circuit measurements; Micromechanical devices; Performance evaluation; Power measurement; Pulse width modulation converters; Semiconductor device measurement;
Conference_Titel :
Solid-State Circuits Conference, 2008. ESSCIRC 2008. 34th European
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4244-2361-3
Electronic_ISBN :
1930-8833
DOI :
10.1109/ESSCIRC.2008.4681888
