DocumentCode :
3491994
Title :
Micromachined silicon needle for ultrasonic surgery
Author :
Lal, Amit ; White, Richard M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Volume :
2
fYear :
1995
fDate :
7-10 Nov 1995
Firstpage :
1593
Abstract :
A micromachined silicon needle structure capable of producing large ultrasonic velocities (~23 m/s) was fabricated. Such a device can be used as a surgical tool. The device consists of two silicon ultrasonic horns bonded with a channel along the length to form the needle. Silicon´s acoustical and mechanical properties make it an ideal resonator material for the body of an ultrasonic cutter. Cutting edges sharper than the conventional needles can be produced using the silicon anisotropic etching process. As a proof of concept, a human eye cataractous lens was dissected with the silicon ultrasonic needle
Keywords :
acoustic resonators; biomedical ultrasonics; elemental semiconductors; etching; eye; micromachining; micromechanical resonators; radiation therapy; silicon; surgery; ultrasonic devices; ultrasonic velocity; 23 m/s; Si; Si anisotropic etching process; acoustical properties; cutting edge; human eye cataractous lens; ideal resonator material; large ultrasonic velocities; mechanical properties; micromachined Si needle; silicon ultrasonic horns; surgical tool; ultrasonic cutter; ultrasonic surgery; Acoustic materials; Anisotropic magnetoresistance; Bonding; Etching; Humans; Mechanical factors; Needles; Optical materials; Silicon; Surgery;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
ISSN :
1051-0117
Print_ISBN :
0-7803-2940-6
Type :
conf
DOI :
10.1109/ULTSYM.1995.495859
Filename :
495859
Link To Document :
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