Development of Flexible Neural Microelectode Arrays Based on Parylene for Retinal Prosthesis

Author

Xing, Yumei ; Chun Hui ; Wu, Yibo ; Xu, Ailan ; Li, Gang ; Zhao, Jianlong ; Ren, Qiushi

Author_Institution

Shanghai Jiaotong Univ., Shanghai

fYear

2008

fDate

6-8 April 2008

Firstpage

548

Lastpage

551

Abstract

Microelectrode arrays (MEAs) have become key components in retinal implants for recording of neural signals or electrical stimulation of nerves. In this paper, implantable flexible MEAs based on a novel polymer, parylene, were developed by designing MEMS process. And electrical performance of prepared microelectrodes was characterized electrochemically. Results showed that impedance and phase delay of testing MEAs were 2000 Omega~100 Omega and -20deg from 10³ Hz to 10⁵ Hz, respectively, which would supply a better application with neural interface for retinal prosthesis.

Keywords

eye; microelectrodes; prosthetics; MEMS process; electrical stimulation; flexible neural microelectode arrays; neural signals; parylene; polymer; retinal implants; retinal prosthesis; Electrical stimulation; Impedance; Implants; Microelectrodes; Micromechanical devices; Neural microtechnology; Neural prosthesis; Polymers; Process design; Retina; Flexible substrates; MEMS; Microelectrode arrays; Parylene; Retinal prosthesis;

fLanguage

English

Publisher

ieee

Conference_Titel

Networking, Sensing and Control, 2008. ICNSC 2008. IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1685-1

Electronic_ISBN

978-1-4244-1686-8

Type

conf

DOI

10.1109/ICNSC.2008.4525278

Filename

4525278