Design of single-loop fourth order digital closed-loop readout circuit for silicon micro-gyroscope

With the advances in technology, the development of microelectronics technology and the popularity of digital circuits, requirements for the performance of gyroscope becomes higher. The work that further making gyro digital in order to improve the performance becomes very important. View of this situation, a new digital readout interface circuit base on Sigma-Delta modulator for micro-mechanical gyro is researched in this paper. A micro-machined gyroscope readout system based on Sigma-Delta Modulator technology was built by using the Matlab Simulink. Its functional verification and simulation obtained SNR 80.2dB, the effective 13.2 bits having a good readout function.