Title :
A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing
Author :
Carballo, V. M Blanco ; Chefdeville, M. ; van der Graaf, H. ; Salm, C. ; Aarnink, A.A.I. ; Smits, S.M. ; Altpeter, D.M. ; Timmermans, J. ; Visschers, J.L. ; Schmitz, J.
Author_Institution :
MESA+ Inst., Twente Univ., Enschede
Abstract :
This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported
Keywords :
CMOS integrated circuits; multiwire proportional chambers; particle detectors; CMOS chip; X-ray detection; detector; high-energy physics; integrated high voltage electrodes; ionizing radiation; materials research; medical purposes; miniaturized multiwire proportional chamber; nuclear physics; particle detection; wafer scale post-processing; Anodes; Degradation; Electrodes; Electrons; Glass; Ionization; Radiation detectors; Voltage; Wires; X-ray detection;
Conference_Titel :
Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European
Conference_Location :
Montreux
Print_ISBN :
1-4244-0301-4
DOI :
10.1109/ESSDER.2006.307655
