Design And Analysis Of A Capacitive Vibration-To-Electrical Energy Converter With Built-In Voltage

Author

Kuehne, Ingo ; Frey, Alexander ; Eckstein, Gerald ; Schmid, Ulrich ; Seidel, Helmut

Author_Institution

Dept. of Mater. & Microsystems, Siemens AG, Corporate Technol., Munich

fYear

2006

fDate

19-21 Sept. 2006

Firstpage

138

Lastpage

141

Abstract

This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. Such a micro-electro-mechanical system (MEMS) based capacitive energy converter is able to provide an output power of 4.28 muW at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s² (0.2 g). This corresponds to a power density of 79.26 muW/cm ³ based on a typical MEMS die size

Keywords

direct energy conversion; micromechanical devices; springs (mechanical); vibrations; 1 kHz; 4.28 muW; capacitive vibration-to-electrical energy converter; charging; microelectromechanical system; parallel-plate capacitor; parallel-plate electrostatic spring-mass-system; state space equations; theoretical design model; work functions; Capacitors; Electrodes; Electrostatics; Equations; Micromechanical devices; Numerical simulation; Power generation; Power system modeling; State-space methods; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European

Conference_Location

Montreux

ISSN

1930-8876

Print_ISBN

1-4244-0301-4

Type

conf

DOI

10.1109/ESSDER.2006.307657

Filename

4099875