Title :
Design And Analysis Of A Capacitive Vibration-To-Electrical Energy Converter With Built-In Voltage
Author :
Kuehne, Ingo ; Frey, Alexander ; Eckstein, Gerald ; Schmid, Ulrich ; Seidel, Helmut
Author_Institution :
Dept. of Mater. & Microsystems, Siemens AG, Corporate Technol., Munich
Abstract :
This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. Such a micro-electro-mechanical system (MEMS) based capacitive energy converter is able to provide an output power of 4.28 muW at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s2 (0.2 g). This corresponds to a power density of 79.26 muW/cm 3 based on a typical MEMS die size
Keywords :
direct energy conversion; micromechanical devices; springs (mechanical); vibrations; 1 kHz; 4.28 muW; capacitive vibration-to-electrical energy converter; charging; microelectromechanical system; parallel-plate capacitor; parallel-plate electrostatic spring-mass-system; state space equations; theoretical design model; work functions; Capacitors; Electrodes; Electrostatics; Equations; Micromechanical devices; Numerical simulation; Power generation; Power system modeling; State-space methods; Voltage;
Conference_Titel :
Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European
Conference_Location :
Montreux
Print_ISBN :
1-4244-0301-4
DOI :
10.1109/ESSDER.2006.307657
