DocumentCode
3493551
Title
The Simulation of Integrated Tool Performance in Semiconductor Manufacturing
Author
Mauer, John L. ; Schelasin, Roland E A
Author_Institution
IBM Technology Products, VT
fYear
1993
fDate
12-15 Dec 1993
Firstpage
814
Lastpage
818
Keywords
Computational modeling; Electronic equipment manufacture; Manufacturing processes; Parallel processing; Reliability engineering; Robots; Semiconductor device manufacture; Semiconductor device modeling; Throughput; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference Proceedings, 1993. Winter
Print_ISBN
0-7803-1381-X
Type
conf
DOI
10.1109/WSC.1993.718324
Filename
718324
Link To Document