• DocumentCode
    3493608
  • Title

    Above IC integrated SrTiO3 high K MIM capacitors

  • Author

    Defaÿ, Emmanuel ; Wolozan, David ; Garrec, Pierre ; André, Bernard ; Ulmer, Laurent ; Aïd, Marc ; Blanc, Jean-Pierre ; Serret, Emmanuelle ; Delpech, Philippe ; Giraudin, Jean-Christophe ; Guillan, Julie ; Pellissier, Denis ; Ancey, Pascal

  • Author_Institution
    CEA-LETI, Grenoble
  • fYear
    2006
  • fDate
    Sept. 2006
  • Firstpage
    186
  • Lastpage
    189
  • Abstract
    This paper describes realization and characterization of SrTiO3 (STO) high k MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors
  • Keywords
    BiCMOS integrated circuits; MIM devices; high-k dielectric thin films; strontium compounds; thin film capacitors; titanium compounds; BiCMOS integrated circuit; SrTiO3; coupling capacitors; high-k MIM capacitors; Annealing; Capacitance; Crystallization; Dielectric constant; Dielectric materials; Ferroelectric materials; High K dielectric materials; High-K gate dielectrics; MIM capacitors; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European
  • Conference_Location
    Montreux
  • ISSN
    1930-8876
  • Print_ISBN
    1-4244-0301-4
  • Type

    conf

  • DOI
    10.1109/ESSDER.2006.307669
  • Filename
    4099887
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3493608