DocumentCode :
3493608
Title :
Above IC integrated SrTiO3 high K MIM capacitors
Author :
Defaÿ, Emmanuel ; Wolozan, David ; Garrec, Pierre ; André, Bernard ; Ulmer, Laurent ; Aïd, Marc ; Blanc, Jean-Pierre ; Serret, Emmanuelle ; Delpech, Philippe ; Giraudin, Jean-Christophe ; Guillan, Julie ; Pellissier, Denis ; Ancey, Pascal
Author_Institution :
CEA-LETI, Grenoble
fYear :
2006
fDate :
Sept. 2006
Firstpage :
186
Lastpage :
189
Abstract :
This paper describes realization and characterization of SrTiO3 (STO) high k MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors
Keywords :
BiCMOS integrated circuits; MIM devices; high-k dielectric thin films; strontium compounds; thin film capacitors; titanium compounds; BiCMOS integrated circuit; SrTiO3; coupling capacitors; high-k MIM capacitors; Annealing; Capacitance; Crystallization; Dielectric constant; Dielectric materials; Ferroelectric materials; High K dielectric materials; High-K gate dielectrics; MIM capacitors; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European
Conference_Location :
Montreux
ISSN :
1930-8876
Print_ISBN :
1-4244-0301-4
Type :
conf
DOI :
10.1109/ESSDER.2006.307669
Filename :
4099887
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3493608
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