Research on a micropump structure with piezoelectric actuator

Based on the working principle of piezoelectricity, an electromechanical-coupled mechanics model is established for the circle-flake microactuator. By using the elastic thin plate bending theory with small deflection, some differential equations for elastic curved surface in circular piezoelectric composite laminates are derived and a kind of analysis and design method is presented that piezoelectric patch´s radial strain induced by inverse piezoelectric effect is equivalently substituted with transverse stress on piezoelectric composite laminates. It is pointed out that the equivalent transverse load depends on the edge electric field distribution of parallel plate capacitor. The expression of the neutral plane in the piezoelectric composite laminates is derived. Based on the obtained numerical solution of transcendental equation for electric field, a finite element structural model for microactuator is developed. Finally a static analysis on the model of micropump is simulated and satisfactory results are obtained.