Angular distribution of cluster atoms due to cluster impact

Author

Muramoto, T. ; Yorizane, K. ; Yamamura, Y.

Author_Institution

Fac. of Inf., Okayama Univ., Japan

Volume

2

fYear

1999

fDate

36495

Firstpage

799

Abstract

The high-density effect on the angular distribution of penetrating cluster atoms due to cluster impacts on solid surfaces has been studied by molecular dynamics simulations. MD simulations are performed for (Cu) ₂₀₁→Pt(111) and (Pt)₂₀₁→Cu(111) where the cluster energies are changed from 5 eV to 50 keV per atom. It is found that the high-density formation is strongly dependent on the cluster energy and the mass ratio between a cluster atom and target atom and that the angular distributions of cluster atom are enhanced near θ=90° for 5 eV/atom Cu cluster

Keywords

copper; impurity distribution; ion implantation; ion-surface impact; metal clusters; molecular dynamics method; platinum; 5 eV to 50 keV; Cu; Cu:Pt; Pt; Pt:Cu; angular distribution; cluster impact; high-density effect; ion implantation; molecular dynamics simulations; penetrating cluster atoms; solid surfaces; Application software; Atomic measurements; Computational modeling; Computer simulation; Informatics; Ion implantation; Smoothing methods; Solid modeling; Sputtering; Surface cleaning;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology Proceedings, 1998 International Conference on

Conference_Location

Kyoto

Print_ISBN

0-7803-4538-X

Type

conf

DOI

10.1109/IIT.1998.813788

Filename

813788