• DocumentCode
    3494840
  • Title

    Method of an assessment of reliability of high-precision measurements

  • Author

    Gushov, V.I. ; Ilinykh, S.P. ; Haidukov, D.S. ; Kuznetsov, R.A.

  • Author_Institution
    Novosibirsk State Tech. Univ., Novosibirsk, Russia
  • fYear
    2012
  • fDate
    2-4 Oct. 2012
  • Firstpage
    105
  • Lastpage
    106
  • Abstract
    Authors offer a new principle of comparison of characteristics and calibration of optical interferential measuring systems with various lengths of waves of laser radiation. Results of measurements of exemplary and certified measuring systems are represented in the form of the decision of system of comparisons which is displayed on a complex phase plane. The offered approach allows receiving with split-hair accuracy an estimation of casual and regular errors of measurements without use of specially prepared standards.
  • Keywords
    calibration; laser reliability; measurement by laser beam; measurement errors; optical variables measurement; calibration; complex phase plane; high-precision measurement reliability; laser radiation; measurement errors; optical interferential measuring systems; split-hair accuracy; Nanomeasurement; laser; standard;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electronics Instrument Engineering (APEIE), 2012 11th International Conference on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4673-2842-5
  • Type

    conf

  • DOI
    10.1109/APEIE.2012.6629152
  • Filename
    6629152