DocumentCode
3494840
Title
Method of an assessment of reliability of high-precision measurements
Author
Gushov, V.I. ; Ilinykh, S.P. ; Haidukov, D.S. ; Kuznetsov, R.A.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fYear
2012
fDate
2-4 Oct. 2012
Firstpage
105
Lastpage
106
Abstract
Authors offer a new principle of comparison of characteristics and calibration of optical interferential measuring systems with various lengths of waves of laser radiation. Results of measurements of exemplary and certified measuring systems are represented in the form of the decision of system of comparisons which is displayed on a complex phase plane. The offered approach allows receiving with split-hair accuracy an estimation of casual and regular errors of measurements without use of specially prepared standards.
Keywords
calibration; laser reliability; measurement by laser beam; measurement errors; optical variables measurement; calibration; complex phase plane; high-precision measurement reliability; laser radiation; measurement errors; optical interferential measuring systems; split-hair accuracy; Nanomeasurement; laser; standard;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electronics Instrument Engineering (APEIE), 2012 11th International Conference on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4673-2842-5
Type
conf
DOI
10.1109/APEIE.2012.6629152
Filename
6629152
Link To Document