• DocumentCode
    349487
  • Title

    Visual observation of decelerated ion beam trajectories by using electronically excited molecular ions (N2+ or CO +) in IBD system

  • Author

    Miyake, Kivoshi

  • Author_Institution
    Power & Ind. Syst. R&D. Div., Hitachi Ltd., Ibaraki, Japan
  • Volume
    2
  • fYear
    1999
  • fDate
    36495
  • Firstpage
    986
  • Abstract
    Visible optical emission from electronically excited molecular N 2+ or CO+ ions was successfully exploited to investigate focusing properties of ion deceleration lens in our ion beam deposition (IBD) system. Yellow or blue light emission was clearly observed at the exit of the deceleration lens when N2 + or CO+ ions was decelerated from 25 keV down to 10 eV or below. The use of these molecular ions is very useful in designing a deceleration lens not only for IBD systems but also for low energy ion implantation systems for shallow junction formation
  • Keywords
    carbon compounds; electrostatic lenses; ion beams; ion implantation; ion optics; nitrogen; particle beam diagnostics; particle beam extraction; particle beam focusing; positive ions; 25 keV to 10 eV; CO; CO+; IBD system; N2; N2+; decelerated ion beam trajectories; electronically excited molecular ions; focusing properties; ion deceleration lens; low energy ion implantation systems; shallow junction formation; visible optical emission; Acceleration; Electrodes; Ion beams; Ion implantation; Ion sources; Lenses; Magnetic separation; Power supplies; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology Proceedings, 1998 International Conference on
  • Conference_Location
    Kyoto
  • Print_ISBN
    0-7803-4538-X
  • Type

    conf

  • DOI
    10.1109/IIT.1998.813844
  • Filename
    813844
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=349487