Large-displacement parametric resonance using a shaped comb drive

Author

Congzhong Guo ; Tatar, E. ; Fedder, Gary K.

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

173

Lastpage

176

Abstract

This paper is the first demonstration of large-stroke parametric resonance excited by an in-plane “shaped-finger” electrostatic comb drive. A custom-shaped comb finger profile is used to produce a quadratic capacitance-engagement response. The ability in selecting electrostatic stiffness coefficients by engineering the comb finger profile allows the excitation of the nonlinear parametric resonance for various applications such as the mode-matched gyroscopes and gravimetric sensors. The shaped-finger comb enables the study of the parametric resonance in systems with high energy storage. The shaped-finger comb parametric resonator is fabricated by a 15 μm-thick SOI-MEMS process.

Keywords

electrostatic devices; micromechanical resonators; silicon-on-insulator; SOI-MEMS process; custom-shaped comb finger profile; electrostatic stiffness coefficients; energy storage; gravimetric sensors; large-displacement parametric resonance; mode-matched gyroscopes; nonlinear parametric resonance; plane shaped-finger electrostatic comb drive; quadratic capacitance-engagement response; shaped comb drive; shaped-finger comb parametric resonator; size 15 mum; Bifurcation; Electrostatics; Fingers; Optical resonators; Resonant frequency; Springs; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474205

Filename

6474205