Title :
Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition
Author :
Purkl, Fabian ; English, T. ; Yama, Gary ; Provine, J. ; Samarao, Ashwin K. ; Feyh, Ando ; O´Brien, Gary ; Ambacher, Oliver ; Howe, R.T. ; Kenny, Thomas W.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
We report the realization of coalescent free-standing ultra-thin (as thin as 5.5 nm) platinum layers deposited via plasma-enhanced atomic layer deposition and their characterization as an uncooled infrared detector. Such thin platinum thermistors enable a responsivity as high as 2 · 107 V/WA, an estimated noise equivalent temperature difference of 163 mK and thermal time constants on the order of 1 ms.
Keywords :
atomic layer deposition; bolometers; infrared detectors; platinum; thermistors; thin film sensors; Pt; coalescent freestanding ultrathin platinum layer; noise equivalent temperature difference estimation; plasma enhanced atomic layer deposition; sub-10 nanometer uncooled platinum bolometer; temperature 163 mK; thermal time constant; thin platinum thermistor; time 1 ms; uncooled infrared detector; Bolometers; Current measurement; Platinum; Thermal conductivity; Thermal sensors; Thickness measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474208
