DocumentCode
3495197
Title
MEMS spatial light modulator for phase and amplitude modulation of spectrally dispersed light
Author
Dunayevsky, Yonathan ; Marom, Dan M.
Author_Institution
Appl. Phys. Dept., Hebrew Univ., Jerusalem, Israel
fYear
2010
fDate
17-20 Nov. 2010
Abstract
We present an active MEMS mirrors array design with adjustable position. This diffractive MEMS modulator is used for independently applying amplitude attenuation and phase control along one dimension. The diffractive MEMS modulator is used for modulating spectral components of incident light, in conjunction with a fiber optic sub-system module.
Keywords
diffractive optical elements; micro-optomechanical devices; micromirrors; optical arrays; optical fibres; phase modulation; spatial light modulators; MEMS spatial light modulator; active MEMS mirrors array design; amplitude modulation; diffractive MEMS modulator; fiber optic subsystem module; phase modulation; spectrally dispersed light; Actuators; Dispersion; Micromechanical devices; Micromirrors; Phase modulation; MEMS; Optical communication; SLM;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Electronics Engineers in Israel (IEEEI), 2010 IEEE 26th Convention of
Conference_Location
Eliat
Print_ISBN
978-1-4244-8681-6
Type
conf
DOI
10.1109/EEEI.2010.5662090
Filename
5662090
Link To Document