• DocumentCode
    3495217
  • Title

    Direct-write n- and p-type graphene channel FETs

  • Author

    Jiyoung Chang ; Yumeng Liu ; Heo Kwang ; Byung Yang Lee ; Seung-wuk Lee ; Liwei Lin

  • Author_Institution
    Sch. of Dentistry, Univ. of California at San Francisco, San Francisco, CA, USA
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    201
  • Lastpage
    204
  • Abstract
    This paper presents a maskless, direct-write process to create both n- and p-type graphene channel FETs (Field Effect Transistors) on a single substrate. There are following achievements as compared with previous works: (1) direct deposition of controllable, arbitrary fiber patterns to construct graphene-based transistor, in which near-field electrospinning process is integrated to pattern the polymer fibers; (2) a maskless doping process to make both n-and/or p-type graphene on the same substrate, in which electrospun fibers serve as both the oxygen plasma etching mask and chemical doping sources, simultaneously; and As such, the demonstrated process could open up a new class of graphene-based devices for various applications.
  • Keywords
    electrospinning; field effect transistors; graphene; polymer fibres; semiconductor doping; sputter etching; arbitrary fiber patterns; chemical doping sources; direct-write n-type graphene channel FET; direct-write p-type graphene channel FET; electrospun fibers; field effect transistors; graphene-based transistor; maskless direct-write process; maskless doping process; near-field electrospinning process; oxygen plasma etching mask; polymer fiber pattern; Chemicals; Doping; Field effect transistors; Graphene; Optical fiber devices; Plasmas; Polymers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474212
  • Filename
    6474212