Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array

Application of `small area´ plasma has become important for bio/medical applications. In this study, a novel device to create patternable atmospheric-pressure plasma-jet array is newly proposed, and the evaluation results of the fabricated devices are reported for the first time. The array device is fabricated by bonding a PDMS microchannel layer and a glass wafer. Discharge electrodes for plasma creation are fabricated by Au/Cr layers. Since the discharge starting voltages strongly depends on shapes and the gap of two electrodes, they were designed and selected based on the Paschen´s law to lower their discharge starting voltages. Micro plasma jet array are created by multi-channel gas discharges individually in microfluidic channels on a chip, and a 2.54mm spatial resolution of plasma-jet was obtained in the first fabricated device.