Cluster size measurement of large Ar cluster ions with time of flight

Author

Toyoda, Noriaki ; Saito, Masahiro ; Hagiwara, Norihisa ; Matsuo, Jiro ; Yamada, Isao

Author_Institution

Ion Beam Eng. Exp. Lab., Kyoto Univ., Japan

Volume

2

fYear

1999

fDate

36495

Firstpage

1234

Abstract

Cluster size distribution is one of the most important factors in impact processes. In this study, cluster size distributions were studied with a time of flight (TOF) mass analyzer which has high mass resolution (M/ΔM=500). The average and maximum cluster size increase with the increase of the source gas pressure. The detection of time of flight ions was performed with micro channel plate (MCP) and the detection probability of MCP decreased in proportion to the velocity of the ions. As the mass of a cluster is much higher than that of a monomer, the velocity of a cluster is much slower at the same acceleration energy. Therefore, higher acceleration energy is required for the detection of large cluster ions

Keywords

argon; atomic clusters; ion-surface impact; time of flight mass spectra; Ar; TOF mass analyzer; cluster size measurement; impact processes; large Ar cluster ions; time of flight mass analyzer; Acceleration; Atomic layer deposition; Atomic measurements; Energy resolution; Ion beams; Ionization; Magnetic field measurement; Size measurement; Smoothing methods; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology Proceedings, 1998 International Conference on

Conference_Location

Kyoto

Print_ISBN

0-7803-4538-X

Type

conf

DOI

10.1109/IIT.1998.813910

Filename

813910