Title :
Heated atomic force microscope cantilevers with wear-resistant ultrananocrystalline diamond tips
Author :
Kim, H.J. ; Moldovan, Nicolaie ; Felts, J.R. ; Somnath, S. ; Dai, Zhijiang ; Jacobs, T.D.B. ; Carpick, Robert W. ; Carlisle, John A. ; King, William P.
Author_Institution :
Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
We report a wear-resistant ultrananocrystalline diamond (UNCD) tip integrated onto a heated atomic force microscope (AFM) cantilever. The batch-fabricated UNCD tips have tip radii of about 10 nm and heights up to 7 μm. The tips were wear-resistant throughout 1.2 m of scanning over a silicon grating at a force of 200 nN and a speed of 10 μm/s. Under the same conditions, a silicon tip was completely destroyed. When used for thermal imaging, the UNCD tip heated cantilever has a vertical imaging resolution of 1.9 nm. Finally, we demonstrate thermal nanolithography of hundreds of nano structures of polyethylene.
Keywords :
atomic force microscopy; cantilevers; diamond; infrared imaging; nanofabrication; nanolithography; nanostructured materials; polymers; AFM; C; heated atomic force microscope cantilevers; nanostructures; polyethylene; silicon grating; thermal imaging; thermal nanolithography; wear-resistant ultrananocrystalline diamond tips; Decision support systems;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474223
