Title :
Process control monitors for single-walled carbon nanotube based sensor fabrication processes
Author :
Chikkadi, K. ; Roman, Costica ; Hierold, C.
Author_Institution :
Micro & Nanosyst., ETH Zurich, Zurich, Switzerland
Abstract :
A novel ex-situ process control monitor (PCM) framework for sensor fabrication processes based on individual single-walled carbon nanotube (SWNT) transistors is presented. PCMs are designed, fabricated and evaluated to estimate the length and density of SWNTs in a typical sensor fabrication process through electrical measurements. We also show that the PCM structures are able to detect variations in SWNT density. The estimates are independently verified through atomic force microscopy and scanning electron microscopy measurements.
Keywords :
atomic force microscopy; carbon nanotube field effect transistors; nanofabrication; nanosensors; process control; scanning electron microscopy; PCM; SWNT density; atomic force microscopy; electrical measurements; process control monitor; scanning electron microscopy measurements; single-walled carbon nanotube based sensor fabrication processes; single-walled carbon nanotube transistors; variation detection; Density measurement; Electrodes; Frequency measurement; Length measurement; Maximum likelihood estimation; Monitoring; Phase change materials;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474231
