Process control monitors for single-walled carbon nanotube based sensor fabrication processes

Author

Chikkadi, K. ; Roman, Costica ; Hierold, C.

Author_Institution

Micro & Nanosyst., ETH Zurich, Zurich, Switzerland

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

275

Lastpage

278

Abstract

A novel ex-situ process control monitor (PCM) framework for sensor fabrication processes based on individual single-walled carbon nanotube (SWNT) transistors is presented. PCMs are designed, fabricated and evaluated to estimate the length and density of SWNTs in a typical sensor fabrication process through electrical measurements. We also show that the PCM structures are able to detect variations in SWNT density. The estimates are independently verified through atomic force microscopy and scanning electron microscopy measurements.

Keywords

atomic force microscopy; carbon nanotube field effect transistors; nanofabrication; nanosensors; process control; scanning electron microscopy; PCM; SWNT density; atomic force microscopy; electrical measurements; process control monitor; scanning electron microscopy measurements; single-walled carbon nanotube based sensor fabrication processes; single-walled carbon nanotube transistors; variation detection; Density measurement; Electrodes; Frequency measurement; Length measurement; Maximum likelihood estimation; Monitoring; Phase change materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474231

Filename

6474231