Ionic-liquid micro ion source array for flexyble concurrent MEMS process

This paper reported a micro ion source array for flexible concurrent fabrication of micro devices. In this study, to simplify and facilitate to integrate the ion sources with high density, ionic liquid (IL) 1-ethyl-3-methl imidazolium tetrafluoroborate ([EMIM]-[BF₄]) was applied to the source material of ions. A reservoir for this IL was integrated to the micro emitter array using silicon micromachining. As experimental results, emitting of the ion from the [EMIM]-[BF₄] and volatilization of silicon fluoride when exposing the silicon wafer to the emitted ion could be confirmed.