DocumentCode
3496185
Title
Vertical continuous flow lithography for fabricating long 3D structures
Author
Habasaki, S. ; Yoshida, Sigeru ; Lee, W.C. ; Takeuch, S.
Author_Institution
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
369
Lastpage
372
Abstract
We propose an in situ photopolymerization method for three dimensional (3D) microfabrications which we call “Vertical Continuous Flow Lithography” (VCFL). We used a digital micromirror device (DMD) as a dynamic photomask and a vertical flow of polyethylene glycol diacrylate (PEGDA) in a microchannel. VCFL can not only fabricate long (~5 mm) structures but also control 3D geometries of structures. We experimentally demonstrated the fabrication of long fibers whose cross-sectional (diameters and shapes) geometries could be controlled. We believe that VCFL will be useful in bottom up tissue engineering to make long complex structures, such as branched blood vessels.
Keywords
masks; microfabrication; micromirrors; photolithography; 3D structure geometries; DMD; PEGDA vertical flow; VCFL; bottom up tissue engineering; branched blood vessels; cross-sectional geometries; digital micromirror device; dynamic photomask; in situ photopolymerization method; long-3D structure fabrication; polyethylene glycol diacrylate vertical flow; three-dimensional microfabrications; vertical continuous flow lithography; Fabrication; Geometry; Lithography; Microchannel; Optical fiber devices; Polymers; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474255
Filename
6474255
Link To Document