• DocumentCode
    3496185
  • Title

    Vertical continuous flow lithography for fabricating long 3D structures

  • Author

    Habasaki, S. ; Yoshida, Sigeru ; Lee, W.C. ; Takeuch, S.

  • Author_Institution
    Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    369
  • Lastpage
    372
  • Abstract
    We propose an in situ photopolymerization method for three dimensional (3D) microfabrications which we call “Vertical Continuous Flow Lithography” (VCFL). We used a digital micromirror device (DMD) as a dynamic photomask and a vertical flow of polyethylene glycol diacrylate (PEGDA) in a microchannel. VCFL can not only fabricate long (~5 mm) structures but also control 3D geometries of structures. We experimentally demonstrated the fabrication of long fibers whose cross-sectional (diameters and shapes) geometries could be controlled. We believe that VCFL will be useful in bottom up tissue engineering to make long complex structures, such as branched blood vessels.
  • Keywords
    masks; microfabrication; micromirrors; photolithography; 3D structure geometries; DMD; PEGDA vertical flow; VCFL; bottom up tissue engineering; branched blood vessels; cross-sectional geometries; digital micromirror device; dynamic photomask; in situ photopolymerization method; long-3D structure fabrication; polyethylene glycol diacrylate vertical flow; three-dimensional microfabrications; vertical continuous flow lithography; Fabrication; Geometry; Lithography; Microchannel; Optical fiber devices; Polymers; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474255
  • Filename
    6474255