Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration

This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type discharge electrode. The discharge characteristic and particle charging capability of the proposed corona discharger were experimentally examined. At the result, the corona current and induced current by charged particles were 3 times higher than those of the tip-to-pate micro corona discharger.